Waferpedia

Comparison ledger

0041-39086 ESC PartversusDM 421 P

Applied Materials 0041-39086 ESC Part, Hitachi DM 421 P, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
DM 421 PHitachi
OEMApplied MaterialsHitachi
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Hitachi DM 421 P
Specifications
Wafer Size—8 inch[1]
Vintage—1995[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing