Comparison ledger
Applied Materials 0041-39086 ESC Part, Applied Materials Centura DPS 2 Poly Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | Centura DPS 2 Poly DryApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Applied Materials Centura DPS |
| Specifications | ||
| Configuration | — | 300mm DPS Metal chamber with 200mm ESC[1] |
| Mainframe | — | 300mm[1] |
| Gas | — | O2, CHF3, Ar, CF4, O2/He, He, N2, HBr, CL2, NF3[1] |
| OS | — | Windows NT[1] |
| Missing | — | 23.11.08 1 LL off line[1] |
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