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Comparison ledger

0041-26723 Bonded Assemblyversus850 SOI Wafer

Applied Materials 0041-26723 Bonded Assembly, EV Group 850 SOI Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—150mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 850
Specifications
Configuration—Fully-Automatic[1]
Wafer size—Suitable for wafer sizes up to 6"/150mm wafers[1]
Manufacturer—EV Group[2]
Model—850 SOI Wafer[1]
Category—Packaging & Bonding[2]
Operating mode—Fully-Automatic[1]
Maximum wafer size—up to 6"/150mm wafers[1]
Current configuration—configured for 6"/150mm wafers[1]
Robot—One Genmark Robot with pre-aligner[1]
Cleaning modules—Two Cleaning Modules[1]
Bonding station—One bonding station with high vacuum[1]
Pre-aligner—Mechanical pre-aligner on bond station (pneumatically actuated)[1]
Control interface—PC controlled with Windows-based graphical user interface[1]
Access control—Password protected access levels[1]
Cleaning control—Programmable rotational speed for substrate cleaning[1]
Cleaning option—Megasonic cleaning option[1]
Vintage—2000[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]lithosupport.comlithosupport.com