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Comparison ledger

0020 23839 PartversusSLR Series

Applied Materials 0020 23839 Part, Plasma-Therm SLR Series, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
SLR SeriesPlasma-Therm
OEMApplied MaterialsPlasma-Therm
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 23839 PartPlasma-Therm SLR Series
Specifications
ConfigurationPlate, Sensor Clamp, Hdpcvd Ultima +[1]—
Tool type—Plasma CVD (Chemical Vapor Deposition)[2]
Category—Deposition[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com