Waferpedia

Comparison ledger

0020 18455 PartversusVES-2550

Applied Materials 0020 18455 Part, Temescal VES-2550, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
VES-2550Temescal
OEMApplied MaterialsTemescal
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartTemescal VES-2550
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
Spare parts kit—VES-2550 O-ring Spares Kit; replacements for all O-rings used on Temescal VES-2550 systems; part no. 0515-5080-0[2]
Shields kit—VES-2550 Shields Kit includes main section shield, dome shield, and plenum shields; part no. 0715-3490-0[2]
Dome type—TP-8-25 Dome custom domes available upon request for VES-2550 systems[3]
Planet type—HSP-25 planets are listed for the VES-2550 system[3]
System type—E-Beam Evaporator[4]
Chamber size—25.5-inch (648mm) diameter, low-profile chamber[5]
Designed for—Semiconductor production environments[5]
Electron beam sources accommodated—Up to three electron beam sources[5]
Pumping options—Cryopump standard; diffusion pump and turbopump also available[5]
Control system (optional)—Temescal PC/PLC Control System[5]
O-ring spares kit—VES-2550 O-ring Spares Kit, replacements for all O-rings used on Temescal VES-2550 systems, part no. 0515-5080-0[2]
Planet removal tool—Planet Removal Tool for use in VES-2550 systems with HSP fixtures, part no. 0217-4073-0[3]
Optional fixture types—TP-8, HSP, and variable-angle planetary fixtures available upon request for VES-2550 systems[3]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]semiconductoronline.comsemiconductoronline.com