Waferpedia

Comparison ledger

0020 18455 PartversusIC/5

Applied Materials 0020 18455 Part, Temescal IC/5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18455 PartApplied Materials
IC/5Temescal
OEMApplied MaterialsTemescal
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18455 PartTemescal IC/5
Specifications
ConfigurationShaft,Rf In Local Match, Hdpcvd,Rev3[1]—
product type—Multi-process deposition controller[2]
application—Deposition controller for e-beam systems[3]
process type—Evaporation and other physical vapor deposition (PVD) processes[3]
software and I/O—Enhanced software and logic I/O features[3]
process storage—Up to 50 processes[2]
layer storage—250 total layers[2]
extended storage—Unlimited with the floppy disk option[2]
data logging—Stores layer and process data in ASCII format for post-run analysis[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.orgweb.archive.org
  3. [3]web.archive.orgweb.archive.org