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Comparison ledger

0020 12458 PartversusProducer GT APF

Applied Materials 0020 12458 Part, Applied Materials Producer GT APF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
Producer GT APFApplied Materials
OEMApplied MaterialsApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartApplied Materials Producer
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]HDD not included[2]
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]—
Wafer Size—300 mm[3]
Chamber Configuration—APF TWIN Chamber (3 chambers)[3]
Loading Configuration—3 LP / 7 cooling station / 25 wafer FOUP[3]
Software Version—pmB5.4_135[3]
Power Rating—110 AC 3-Phase for system[3]
Process Gases—C3H6, C2H2, H2, He (HI/LO), NF3, O2, Ar (HI/LO), N2[3]
Optional Gas Flows—NF3 1000 sccm, C3H6 3000 sccm, C2H2 4000 sccm, H2 10000 sccm, Ar 15000 sccm, O2 15000 sccm, He 5000 sccm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]macquarie.commacquarie.com