Waferpedia

Comparison ledger

0010 47763versusScientific FEI OptiFIB Taipan G 2 FIB

Applied Materials 0010 47763, Thermo Fisher Scientific FEI OptiFIB Taipan G 2 FIB, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
OEMApplied MaterialsThermo Fisher
CategoryEtchEtch
Wafer size——
Process node—7 nm
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010 47763Thermo Fisher Scientific FEI OptiFIB Taipan G 2 FIB
Cited variants—
  • OptiFIB Taipan G 2[1]
  • 7 nm CE Upgrade[2]
Specifications
Configuration2nd Source New[3]7 nm[1]
TypeMonopolar Dual Heated[4]Focused Ion Beam (FIB)[1]
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[5]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[4]—
Model0010-47763[3]—
OEMApplied Materials[3]—
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[4]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[4]—
Quantity available (source)1[4]—
Full Load Amps—24 A[1]
Full Load—24 A[6]
Largest Load—13 A[6]
Acceleration Voltage—0.5-30 kV[8]
Beam Current Range—250 fA up to 20 nA[8]
Stage Travel (X,Y,Z)—75 x 75 x 20 mm[8]
Beam Drift Stability—~4 nm/min (drift)[8]
Conductor Resistivity (for deposit)—≤ 200 µΩ·cm[8]
Insulator Resistivity—≥ 1e15 µΩ·cm[8]
FIB Column / Type—Ion-photon Coaxial Taipan Column[8]
Image Resolution—~ 2.7 nm at 250 fA, 30 kV (graphite sample)[8]
Node capability—7 nm[6]
Electrical requirements—200-240 VAC, Single Phase, 50/60 Hz[1]
Full load current—24 A[1]
Largest load current—13 A[6]
Vintage year—2015[1]
Tool type—Focused Ion Beam (FIB)[1]
Node—7 nm[1]
Power—200-240 VAC[1]
Phase—Single Phase[1]
Frequency—50/60 Hz[1]
Upgrade—CE Upgrade[6]
Upgrade note—Upgrade from 10 nm G1 to 7 nm G2[2]
Condition note—Without HDD / SSD[1]
Electrical rack note—Tapian Electrical Rack[7]

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Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]saulcontrol.comsaulcontrol.com
  5. [5]getspares.comgetspares.com
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing