Comparison ledger
Applied Materials 0010 47763, Plasma-Therm Versaline VLN ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | Versaline VLN ICPPlasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | Brooks TM (Transfer Module) with four Wafer Manual Load Lock |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Plasma-Therm Versaline |
| Specifications | ||
| Configuration | 2nd Source New[1] | Manual Load Lock for Single or Multiple Wafers[4] |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | Versaline VLN ICP[4] |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Voltage | — | 208V, 60 Hz, 3 phase[4] |
| Wafer size | — | Brooks TM (Transfer Module) with four Wafer Manual Load Lock[5] |
| Manufacturer | — | Plasma-Therm[4] |
| Category | — | Etch[6] |
| Process type | — | Inductively coupled plasma[4] |
| Wafer handling | — | Manual load lock for single or multiple wafers[4] |
| Chamber | — | Single ICP chamber[5] |
| RF power supply 1 | — | ENI ACG-6B RF Power Supply – 600W @ 13.56MHz with Seren AT6NVL Matchwork & MC2 Tunner[4] |
| RF power supply 2 | — | ENI GMW-25A RF Power Supply – 2500W @2.0MHz with Seren AT25NVL Matchwork & MC2 Tunner[4] |
| Pressure controller | — | VAT PM5 Pressure Controller with Leybold Turbo pump[5] |
| Turbo pump | — | Seiko Seiki 1303CV Turbo Pump with Seiko Seiki SCU 750 controller[5] |
| Gas handling | — | (5) MFCs-gas with Isolation, Process and By-pass valves[4] |
| Backside cooling | — | He Backside Cooling[4] |
| Chamber heater | — | Watlow chamber heater and controller[4] |
| Control software | — | Windows Based OS[4] |
| Electrical | — | 208V, 60 Hz, 3 phase[4] |
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