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0010 47763versusCentura AP AdvantEdge G 5 Dry

Applied Materials 0010 47763, Applied Materials Centura AP AdvantEdge G 5 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010 47763Applied Materials
Centura AP AdvantEdge G 5 DryApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010 47763Applied Materials Centura
Specifications
Configuration2nd Source New[1]3 Wire + G Line[4]
TypeMonopolar Dual Heated[2]—
DescriptionASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3]—
Possible MaterialsAl2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
Model0010-47763[1]Centura AP AdvantEdge G 5[4]
OEMApplied Materials[1]Applied Materials[4]
Material (possible)Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2]—
ApplicationFixing wafers in etching process (PVD, CVD, ETCH)[2]—
Quantity available (source)1[2]—
Phase—3 Phase[4]
Chamber A Chemicals Gases Used—BCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar[4]
Chamber B Chemicals Gases Used—BCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar[4]
Chamber D Chemicals Gases Used—N2, O2, CF4[4]
Equipment type—Dry Etcher[4]
Electrical—3 Phase - 3 Wire[4]
Line—G Line[4]
Frequency—50/60 Hz[4]
Loadport—Standard Loadport[4]
Control system—Server GEM II[4]
Chamber A gases—BCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar[4]
Chamber B gases—BCl3, Cl2, SO2, NF3, CH2F2, HBr, O2, N2, CF4, He, CHF3, SF6, Ar[4]
Chamber D gases—N2, O2, CF4[4]
HDD—No HDD[4]
Vintage—2013[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]saulcontrol.comsaulcontrol.com
  3. [3]getspares.comgetspares.com
  4. [4]inventory listing