Waferpedia

Comparison ledger

0010-22161 High EFF RF Matchversus20L 100V 200W Ion Pump Set

Applied Materials 0010-22161 High EFF RF Match, Varian 20L 100V 200W Ion Pump Set, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsVarian
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchVarian 20L 100V 200W Ion Pump Set
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—911-5036 20 Litre Ion Pumps with Magnet[3]
Pump Volume—20 litres each[3]
Operating Voltage—100V[3]
Power—200W[3]
Part Number—911-5036[3]
Fitting—304 LN ESR[3]
Compatible SEM Models—Hitachi S-4200, S-4500[3]
Pump Configuration—911-5036 20 Litre Ion Pumps with Magnet[3]
Pump Volume (each)—20 litres[3]
Quantity sold as set—2[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing