Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusSE 1000 6 6 Environmental

Applied Materials 0010-22161 High EFF RF Match, Thermotron SE 1000 6 6 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron SE 1000 6 6 Environmental
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Workspace Volume—34.8 ft³ / 986 L[3]
Temperature Range—-70ºC to 180ºC[3]
Temperature Uniformity—±0.5ºC[3]
Humidity Range—10 to 98% RH[3]
Humidity Control—+/- 2.5% RH[3]
Airflow—1,000 CFM[3]
Heating Performance (-65° to 71°C)—20 minutes / 6.8°C per minute[3]
Cooling Performance (85° to -40°C)—26 minutes / 4.7°C per minute[3]
Electrical Requirements (460 V / 3 / 60)—32 Full Load Amps[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]thermotron.comthermotron.com