Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, SUSS MicroTec AS 8 Alta Spray, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | AS 8 Alta SpraySUSS MicroTec |
|---|---|---|
| OEM | Applied Materials | SUSS MicroTec |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | SUSS MicroTec AS 8 |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Configuration | — | With:[3] |
| Tool type | — | Manual spray coater for high topographies[4] |
| Substrate size | — | Up to 200 mm and square substrates up to 6 inch edge length[4] |
| Wafer sizes | — | 3, 4, 5, 6, 8 inch[3] |
| Spray coater description | — | Spray coater for 3-inch to 8-inch wafers[5] |
| Maximum substrate size | — | 8 inch[6] |
| Resist spray dispense system | — | High precision resist spray dispense system up to 30 CPS, Resist type[3] |
| Pre-wet dispense nozzle | — | Altaspray, bowl clean solvent type[3] |
| Pressure tank system | — | 10 L SS with coupling[3] |
| Substrate assembly | — | R6 Altaspray BSR ready[3] |
| Resist storage | — | Stainless steel (x2)[3] |
| Media storage | — | SS EX[3] |
| Waste canister | — | 10 L stainless steel[3] |
| Transformer | — | For manual tool[3] |
| Vintage | — | 2018[3] |
| Spray axis velocity | — | Up to 500 mm/s[4] |
| Acceleration | — | Up to 9 m/s²[4] |
| Z-axis adjustment range | — | Up to 45 mm[4] |
| Nozzle adjustment range | — | 67.5 mm to 107.5 mm[4] |
| Chuck rotation | — | Up to 1,000 rpm[4] |
| Nozzles | — | Dual spray nozzles and separate solvent nozzle[4] |
| Filter unit | — | Solvent[3] |
| Maximum rotation speed | — | Up to 1,000 rpm[4] |
| Manual | — | 2018[3] |