Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer TPU 062 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | TPU 062 Turbomolecular VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer TPU 062 Turbomolecular Vacuum |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Inlet flange | — | DN 63 CF-F[3] |
| Outlet flange | — | DN 16 ISO-KF[3] |
| Pumping speed (N2) | — | 56 l/s[3] |
| Final pressure | — | 1 x 10^-11[3] |
| Bearing type (high vacuum side) | — | wear free permanent magnetic bearing[3] |
| Bearing type (backing side) | — | oil lubricated ceramic bearing[3] |