Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Pfeiffer TPU 050 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | TPU 050 VacuumPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Pfeiffer TPU 050 Vacuum |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[3] | — |
| Model | 0010-22161[3] | TPU 050[5] |
| Description | HTESC PH 1 REV A[4] | — |
| Condition | Used[4] | — |
| Stock Number | BM6628[4] | — |
| Manufacturer | — | Pfeiffer[5] |
| Type | — | Turbomolecular vacuum pump[1] |
| Inlet flange | — | DN 63 CF[2] |
| Outlet flange | — | DN 16 KF[2] |
| Venting connection | — | DN 10 KF[2] |
| Volume flow rate for nitrogen | — | 50 l/s[2] |
| Volume flow rate for helium | — | 55 l/s[2] |
| Volume flow rate for hydrogen | — | 50 l/s[2] |
| Compression ratio for nitrogen | — | 8 x 10^8[2] |
| Compression ratio for helium | — | 2.5 x 10^4[2] |
| Compression ratio for hydrogen | — | 10^3[2] |
| Proposed backing pump, minimum | — | 1.5 m3/h[2] |
| Ultimate pressure, theoretical | — | 10^-11 mbar[2] |
| Ultimate pressure 1 | — | <1 x 10^-10 mbar[2] |
| Ultimate pressure 2 | — | <1 x 10^-9 mbar[2] |
| Ultimate pressure 3 | — | <5 x 10^-8 mbar[2] |
| Rated speed | — | 90,000 U/min[2] |
| Run-up time | — | 3 min[2] |
| Oil filling | — | 1 cm3[2] |
| Cooling | — | Standard, up to an ambient temperature of 30 °C, convection/water[2] |
| Cooling water requirement | — | 15 l/h[2] |
| Power input, heater | — | 40 W[2] |
| Magnetic field, max. | — | 7 mT[2] |
| Weight | — | 2.5 kg[2] |
| Volume flow rate for nitrogen (N2) | — | 50 l/s[1] |
| Volume flow rate for helium (He) | — | 55 l/s[2] |
| Volume flow rate for hydrogen (H2) | — | 50 l/s[1] |
| Compression ratio for nitrogen (N2) | — | 8 x 10^8[1] |
| Compression ratio for helium (He) | — | 2.5 x 10^4[2] |
| Compression ratio for hydrogen (H2) | — | 10^3[2] |
| Ultimate pressure | — | 1 x 10^-11 mbar[6] |
| Bearing description | — | Permanent magnetic bearing at the high vacuum side and oil lubricated ceramic bearing at the backing side[6] |