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0010-22161 High EFF RF MatchversusDuo 35 M Vacuum

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer Duo 35 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer Duo
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Pumping Speed S(N2)—36.0 m3/h[3]
Max Speed (n)—1800 rpm[3]
Oil Type—Pfeiffer P3 vacuum oil[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing