Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusNSR S 204 B Step and Repeat

Applied Materials 0010-22161 High EFF RF Match, Nikon NSR S 204 B Step and Repeat, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsNikon
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchNikon NSR S 204
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]NSR S 204 B[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]Parts machine[3]
Stock NumberBM6628[2]—
Phase—3 Phase[3]
Configuration—3 Wire[3]
OEM—Nikon[3]
Equipment type—Step and Repeat System[3]
Power—3 Phase - 3 Wire - 50/60 Hz[3]
Vintage—2000 Vintage[3]
Power supply—3 Phase, 3 Wire, 50/60 Hz[3]
System type—Step and Repeat[3]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]Equipment inventory listing