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Comparison ledger

0010-22161 High EFF RF MatchversusVision 2000-C™

Applied Materials 0010-22161 High EFF RF Match, MKS Vision 2000-C™, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchMKS Vision 2000-C™
Cited variants—
  • Vision 2000-E™[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]—
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Minimum Detectable Partial Pressure—<2.7e-9 Pa (<2e-11 Torr)[1]
Monitoring Type—Continuous in situ monitoring[1]
Baseline Monitoring—Air leaks and background contamination[1]
Remote Vacuum Controller—RVC for failsafe vacuum operation[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]api.p1.mks.comapi.p1.mks.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com