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0010-22161 High EFF RF Matchversus627H

Applied Materials 0010-22161 High EFF RF Match, MKS 627H, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
627HMKS
OEMApplied MaterialsMKS
Category——
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FamilyApplied Materials 0010-22161 High EFF RF MatchMKS 627H
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Full Scale range—0.02 to 25,000 Torr[3]
Accuracy—0.12% or 0.15% of reading[3]
Overpressure limit—45 psia (310 kPa) or 120% of full scale, whichever is greater[3]
Temperature control—45°C[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]api.p1.mks.comapi.p1.mks.com