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Comparison ledger

0010-22161 High EFF RF MatchversusIGX 600 M

Applied Materials 0010-22161 High EFF RF Match, Edwards IGX 600 M, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IGX 600 MEdwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards IGX 600 M
Cited variants—
  • iGX600M 200 V-230 V 50/60 Hz[1]
  • iGX600M 380 V-460 V 50/60 Hz[1]
Specifications
MakeApplied Materials[2]—
Model0010-22161[2]IGX 600 M[5]
DescriptionHTESC PH 1 REV A[3]—
ConditionUsed[3]—
Stock NumberBM6628[3]—
Inlet—ISO100[4]
Exhaust—KF25[4]
Pumping speed—365 CFM[4]
Ultimate pressure—5.25 x 10-4 Torr[4]
Weight—485 lbs[4]
Manufacturer—Edwards[5]
Type of product—dry pump[4]
Sources (5)Every fact above is drawn from these public sources
  1. [1]manualslib.commanualslib.com
  2. [2]Equipment inventory listing
  3. [3]tarasemi.comtarasemi.com
  4. [4]provac.comprovac.com
  5. [5]Equipment inventory listing