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Comparison ledger

0010-22161 High EFF RF MatchversusIGX 600 L

Applied Materials 0010-22161 High EFF RF Match, Edwards IGX 600 L, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
IGX 600 LEdwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
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FamilyApplied Materials 0010-22161 High EFF RF Match—
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Type—dry pump[3]
Inlet—ISO100[3]
Exhaust—KF25[3]
Pumping speed—365 CFM[3]
Ultimate pressure—5.25 x 10^-4 Torr[3]
Weight—485 lbs[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]provac.comprovac.com