Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards FL 20 K Foreline Trap, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | FL 20 K Foreline TrapEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards FL 20 K Foreline Trap |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Ambient operating temperature range | — | 0 to 50 °C[3] |
| Maximum internal pressure | — | 1 bar absolute, 1 x 10^5 Pa[3] |
| Mass | — | 1 kg[3] |
| Sorbent charge | — | 0.07 kg[3] |
| Leak tightness (1 bar differential) | — | 1 x 10^-6 mbar ls-1, 1 x 10^-4 Pa ls-1[3] |
| Trapping efficiency for oil mist | — | 99.7%[3] |
| Sorbent material | — | Activated alumina[4] |
| Body material | — | Cast aluminum[5] |
| Flange type | — | ISO KF25 (NW25)[5] |
| Dimensions (height x width) | — | 5.5 x 4 inches[5] |
| Weight | — | 1.5 lb[5] |
| Compatible pump models | — | RV3, RV5, RV8, RV12, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M30[6] |
| Rejuvenation method | — | Bake basket for 2 hours at 250-300 °C[3] |
| Part numbers | — | A13305000, A133-05-000, H026-00-050, H02600050[5] |
| Leak tightness | — | 1 x 10^-6 mbar l/s (1 x 10^-4 Pa l/s)[3] |
| Oil mist trapping efficiency | — | 99.7%[3] |
| Sorbent rejuvenation | — | Bake basket at 250 °C - 300 °C for 2 hours[3] |
| Fits pump models | — | RV3, RV5, RV8, RV12, E2M2, E2M5, E2M8, E2M12, E1M18, E2M18, E2M28, E2M30[5] |
| Inlet/Exhaust flanges | — | ISO KF25 (NW25)[5] |
| Dimensions | — | Height 5.5 inches, Width 4 inches[5] |
| Material | — | Cast Aluminum[5] |