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0010-22161 High EFF RF MatchversusEMF 20 Oil Mist Filter

Applied Materials 0010-22161 High EFF RF Match, Edwards EMF 20 Oil Mist Filter, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
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FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards EMF 20 Oil Mist Filter
Specifications
MakeApplied Materials[1]Edwards[3]
Model0010-22161[1]EMF 20[3]
DescriptionHTESC PH 1 REV A[2]Oil Mist Exhaust Filter[5]
ConditionUsed[2]—
Stock NumberBM6628[2]—
Item number—A462-29-000[4]
Part number—P102663[5]
Type—Oil Mist Filter[3]
Inlet & exhaust flanges—ISO KF25 (NW25)[5]
Fits pump models—RV12, E1M18, E2M18[5]
Suitable for—Edwards rotary vane pumps up to E2M18[5]
Dimensions—Height 7.5 x Width 5 inches[5]
Weight—1.5 lb[5]
Body material—Durable plastic body[5]
Odor filter element—Activated carbon[5]
Oil filter element—Epoxy impregnated glass fiber[5]
Supplied fittings—NW25 clamp, centering ring, O-ring, NW25 to 3/4 BSP adapter, 1 oil element filter, and 1 odor element[5]
Performance—99.999% DOP test efficiency[5]
Protection feature—Integral pressure relief valve opens if the oil element becomes blocked[5]
Feature—Azide proof[5]
Body—White bottom half is semi-transparent for oil level monitoring[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]idealvac.comidealvac.com
  5. [5]idealvac.comidealvac.com