Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards E 306 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | E 306 AEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards E 306 A |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | — |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Configuration | — | With a CT-200 cryopump and an Oil based Edwards roughing pump[3] |
| Tool type | — | Coater[3] |
| Vacuum & pumping | — | With a CT-200 cryopump and an oil based Edwards roughing pump[4] |
| Features | — | 2ea rotating shields that keep deposition and heat off of the belljar[3] |
| Known issue / consumable note | — | The thermal baskets need to be replaced as they are expendable items[3] |
| Included instrumentation | — | Ion gauge[3] |