Waferpedia

Comparison ledger

0010-21246 PartversusRFS-O-11 Atomic Oxygen Plasma Source

Applied Materials 0010-21246 Part, Veeco RFS-O-11 Atomic Oxygen Plasma Source, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsVeeco
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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Family—Veeco RFS-O-11 Atomic Oxygen Plasma Source
Specifications
Configuration—Custom - Custom MBE System[1]
RFS Housing Option—Standard - Standard Housing[1]
Oxygen Plasma Accy Package—Accy1 - Standard O2 Plasma Accy Pkg Standard[1]
Housing Option—Standard[1]
Oxygen Plasma Bulb Assembly—Bulb1[1]
Matching Unit Option—None[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing