Waferpedia

Comparison ledger

0010-21246 PartversusAdixen ADS 501

Applied Materials 0010-21246 Part, Pfeiffer Adixen ADS 501, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer Adixen ADS 501
Specifications
Type—Dry pump[1]
Inlet—ISO100[1]
Exhaust—KF40[1]
Pumping speed (60 Hz)—300 CFM[1]
Ultimate pressure (60 Hz)—6 x 10^-4 Torr[1]
Weight—844 lbs[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]provac.comprovac.com