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0010-21246 PartversusRainbow 4520 XL

Applied Materials 0010-21246 Part, Lam Research Rainbow 4520 XL, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
Rainbow 4520 XLLam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
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Family—Lam Research Rainbow 4520
Cited variants—
  • Rainbow 4520 XL Dielectric[1]
Specifications
Configuration—Envision[2]
Wafer Sizes—6 inch[2]
Gases—C4F8, SF6, CHF3, CH3F, Ar, O2, N2, CF4[1]
Category—Etch / Dielectric Etch[1]
0010-21246 Part entryRainbow 4520 XL entryAsk about these tools →Share experience with this comparison →
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing