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Comparison ledger

0010-18024 Pyrometer AssemblyversusOrion NanoFab

Applied Materials 0010-18024 Pyrometer Assembly, Zeiss Orion NanoFab, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsZeiss
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyZeiss Orion NanoFab
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Instrument type—Focused ion beam (FIB) microscope[2]
Functions—Ultrahigh-resolution imaging, direct writing, and lithography platform[2]
Beam species—Operates with either He or Ne[2]
He beam probe—~0.5 nm[2]
He beam imaging performance—Produces sub-5 nm resolution images and patterns with large depth of field[2]
Ne beam application range—Direct write and lithography applications between 10 and 100 nm[2]
Sample capability—Non-conductive samples can be imaged with the aid of an electron flood gun[2]
Beam types—Helium (He) and Neon (Ne)[2]
Helium probe size—~0.5 nm[2]
Helium resolution—sub-5 nm[2]
Neon direct write and lithography range—10 to 100 nm[2]
Electron flood gun—For imaging non-conductive samples[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nano.upenn.edunano.upenn.edu