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0010-18024 Pyrometer AssemblyversusSurfscan SP 1 TBI Particle Defect

Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan SP 1 TBI Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA Surfscan
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]208-240 V[2]
Full Load—24 A[2]
Machine Main Breaker Rating—30 A[2]
Rating of Largest Load—12 A (laser)[2]
Phase—1 Phase[3]
OEM—KLA[2]
Model—Surfscan SP 1 TBI[2]
Wafer sizes—8 inch, 12 inch[4]
Wafer size (single configuration)—12 inch[3]
Input power—208-240 V, single phase, 50/60 Hz[2]
Full load current—24 A[2]
Wafer loading—Single FOUP loader[3]
Main Breaker Rating—30 A[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]inventory listing