Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, KLA Surfscan 6220 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | |
|---|---|---|
| OEM | Applied Materials | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | KLA Surfscan 6220 |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | Cosmetic Modification:[2] |
| Model | — | Surfscan 6220[2] |
| OEM | — | KLA[2] |
| Category | — | Metrology & Inspection[3] |
| Tool type | — | particle defect system[2] |
| Application | — | bare wafer surface defect inspection system[4] |
| Wafer sizes | — | 2", 3", 4", 6" and 8" wafer capable[4] |
| Sensitivity | — | 0.09 micrometer diameter PSL sphere equivalent with greater than 80 percent capture rate (0.112um @ 90%)[4] |
| Repeatability | — | count repeatability error less than 0.5 percent at 1 standard deviation (mean count greater than 500, 0.364 mm dia. latex spheres)[4] |
| Accuracy | — | count accuracy better than 99 percent (verified with VLSI Standards' Relative Standard)[4] |
| Throughput | — | 100 wph (200 mm) at 0.12 mm[4] |
| Contamination | — | less than 0.005 particles/cm2 greater than 0.15 mm dia. per single pass[4] |
| Cassette handling | — | single puck wafer handling from two cassettes (one sender/receiver, one receiver)[4] |
| Illumination source | — | 30 mW Argon-Ion laser, 488 nm wavelength[4] |
| Operator interface | — | mouse and/or dedicated user keypad[4] |
| Cosmetic modification | — | Stanley Still monitor and emergency power-off box removed from the tool; monitor and power switch remote on an adjacent table[2] |
| Vintage | — | 1995[2] |
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