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0010-18024 Pyrometer Assemblyversus6420

Applied Materials 0010-18024 Pyrometer Assembly, KLA 6420, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6420KLA
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2023 decommissioned
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA 6420
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]new laser[2]
Manufacturer—KLA[3]
Model—6420[2]
Tool type—Inspection System[2]
Category—Metrology & Inspection[3]
Wafer sizes—8 inch[2]
Vintage—1997 Vintage[2]
Status note—software boots; measurement and board functionality noted; laser inoperative[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com