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Comparison ledger

0010-18024 Pyrometer AssemblyversusCG 5000 CD-SEM

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi CG 5000 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Automatic Beam Alignment on wafer
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi CG 5000 CD-SEM
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Critical Dimension (CD) Measurement Scanning Electron Microscope (SEM)[2]
Resolution—1.45nm with signal processing function.[2]
Measurement repeatability—0.25nm (3sig)[2]
Throughput—50wph (20 measurements/wafer), approximately 40%[2]
Wafer size—Automatic Beam Alignment on wafer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing