Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Filmetrics F50-UV, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | F50-UVFilmetrics |
|---|---|---|
| OEM | Applied Materials | Filmetrics |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Filmetrics F50-UV |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Vendor | — | Filmetrics[2] |
| Model | — | Filmetrics F50-UV[2] |
| Measurement method | — | spectroscopic reflectometry[3] |
| Function | — | thin-film thickness and optical characteristics measurement[2] |
| Automated stage | — | yes[2] |
| Sample size | — | up to 8 inches in diameter[2] |
| Substrate size | — | ~5 mm × 5 mm to 200 mm diameter[3] |
| Thickness measurement range | — | 5 nm – 40 µm[3] |
| Minimum thickness to measure n and k | — | 50 nm[3] |
| Wavelength range | — | 190–1100 nm[3] |
| Spot size | — | 1.5 mm[3] |
| Light source | — | deuterium + tungsten-halogen (dual light source; may choose one or both lamps)[3] |
| Measurement results visualization | — | 2D and 3D[3] |
| Measurement results visualisation | — | 2D and 3D[3] |
| Wafer handling | — | Up to 8"[2] |
| Sample stage | — | Fully automated[2] |
| Measurement rate | — | up to 2 points per second[2] |
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