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0010-18024 Pyrometer AssemblyversusSEMVision G 3 Lite DR-SEM

Applied Materials 0010-18024 Pyrometer Assembly, Applied Materials SEMVision G 3 Lite DR-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SEMVision G 3 Lite DR-SEMApplied Materials
OEMApplied MaterialsApplied Materials
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—Wafer rotation option
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyApplied Materials SEMVision
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]EDX option[2]
Software version—5.3.100[2]
Loader—3 TDK ADO with RFID[2]
Robot—Brooks, single blade with through beam mapper[2]
SEM system—G3 column (FEI / Denka tip)[2]
Optical systsem—OM with 5x, 20x, 100x[2]
Wafer size—Wafer rotation option[2]
Stage wafer holder—electrostatic chuck[2]
OEM—Applied Materials[2]
Model—SEMVision G 3 Lite DR-SEM[2]
Category—Metrology & Inspection[3]
Tool type—Defect review scanning electron microscope[2]
Optical system—OM with 5x, 20x, 100x[2]
EDX option—Present[2]
Tilt option—Present[2]
Wafer rotation option—Present[2]
Condition—Fully refurbished[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com