Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tegal 90 X, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 90 XTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Tegal 90 X |
| Specifications | ||
| OEM | Applied Materials[1] | Tegal[3] |
| Model | 0010-16392[1] | 90 X[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Dry Etch[3] |
| Tool type | — | Plasma Etcher[3] |
| Process type | — | Dry Etch[3] |
| Related description | — | non-critical etch tool[5] |
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