Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Plasma-Therm Versalock 700 ICP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Versalock 700 ICPPlasma-Therm |
|---|---|---|
| OEM | Applied Materials | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Plasma-Therm Versalock 700 ICP |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Dual Chamber Etcher[3] |
| Phase | — | 3 Phase[4] |
| Frequency | — | 60 Hz[4] |
| Voltage | — | 208V[4] |
| Pumps | — | 3 Edward Pumps[3] |
| Chillers | — | 2 Neslab Chillers[3] |
| Control system update | — | Vortex Computer Update[3] |
| Vintage | — | 1998[4] |
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