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Comparison ledger

0010-16392 ESC AssemblyversusMarch AP 300

Applied Materials 0010-16392 ESC Assembly, Nordson March AP 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsNordson
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyNordson March
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]—
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Configuration—100-240 V[3]
Phase—1 Phase[3]
Power—2 kVA[3]
RF Generator—300 Watt, 13.56 MHz[3]
Gas delivery—2 gas sources can be plumbed into system[3]
MFCs—Built in MFCs[3]
Vacuum pump—Vacuum pump included[3]
Control—Advanced PLC Controllers, Touch Screen, GUI Software Interface[3]
Safety—Full System Safety Enclosure[3]
Automated tuning—Integrated RF Automated Tuning Network[3]
Vintage—2010[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]inventory listing