Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusAlliance 4400

Applied Materials 0010-16392 ESC Assembly, Lam Research Alliance 4400, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
Alliance 4400Lam Research
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1995 Vintage
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research Alliance
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]—
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Configuration—2 chamber and Controller[3]
Configuration (Asset #127688)—2 chamber and Controller[3]
Controller Rack (Asset #127688)—Missing[3]
Configuration (Asset #127686)—2 Chamber Set and Controller[4]
Completeness (Asset #127686)—Not a complete set (chamber only)[4]
Vintage (Asset #127686)—1995[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]inventory listing
  4. [4]inventory listing