Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 Exelan Flex, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 2300 Exelan FlexLam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research 2300 |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | 2300 Exelan Flex[4] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | 12 inch (300 mm)[4] |
| Electrode Configuration | Dual[2] | — |
| Voltage | — | 208 VAC[3] |
| Configuration | — | 50/60 Hz[3] |
| Full Load Current | — | 56 A[3] |
| Main CB Current Rating | — | 70 A[3] |
| Frequency | — | 50/60 Hz[3] |
| Make | — | Lam[4] |
| Wafer Sizes | — | 12 inch[4] |
| Equipment type | — | Etch Chamber[4] |
| Power | — | 208 VAC, 50/60 Hz[3] |
| Vintage | — | 2006[3] |
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