Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials eMax CT Plus Dielectric, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | eMax CT Plus DielectricApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials eMax |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | Alcatel ATH 1600 M Turbo Pump[3] |
| Bias | — | 13.5 MHz (Bias) & 2 MHz (LF Bias)[3] |
| LF Bias | — | Daihen RMN-50N1[3] |
| Source | — | Daihen AMN-30 H 60 MHz[3] |
| Gate Valve | — | Nor-Cal / NC-95-PP[3] |
| FIB | — | eFib, wFib[3] |
| Turbo Pump | — | Alcatel ATH 1600 M[3] |
| RF Match Box | — | Included[3] |
| RF Generator | — | Included[3] |
| Chamber Equip Cart | — | Included[3] |
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