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0010-13627 High Efficiency RF MatchversusTPH 170 Turbomolecular Vacuum

Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer TPH 170 Turbomolecular Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-13627 High Efficiency RF MatchPfeiffer TPH
Specifications
ConfigurationHE, BIAS[1]Humming sound when running[2]
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]—
Volume flow rate—170[2]
Voltage—110V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing