Comparison ledger
Applied Materials 0010-13627 High Efficiency RF Match, Pfeiffer Hicube 80 Eco Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13627 High Efficiency RF MatchApplied Materials | Hicube 80 Eco TurboPfeiffer |
|---|---|---|
| OEM | Applied Materials | Pfeiffer |
| Category | Lab & Support Equipment | Lab & Support Equipment |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13627 High Efficiency RF Match | Pfeiffer Hicube 80 Eco Turbo |
| Cited variants | — | |
| Specifications | ||
| Configuration | HE, BIAS[3] | 115-230 V[4] |
| Asset Number | 70430[3] | — |
| Type | High Efficiency RF Match - HE, BIAS[3] | Turbo pumping station[5] |
| Turbopump | — | HiPace 80[1] |
| Backing pump | — | MVP 015-2[1] |
| Inlet flange | — | DN 63 ISO-K / DN 63 CF / DN 40 ISO-KF[1] |
| Pumping speed for N₂ (DN 63 ISO-K) | — | 67 l/s[5] |
| Pumping speed for N₂ (DN 40 ISO-K) | — | 65 l/s[6] |
| Ultimate pressure | — | < 1 × 10⁻⁷ hPa[5] |
| Ultimate pressure without gas ballast | — | < 1 × 10⁻⁷ hPa[5] |
| Cooling method | — | Air (forced convection)[5] |
| Mains voltage | — | 100 – 240 V[5] |
| Mains frequency | — | 50/60 Hz[5] |
| Power consumption | — | 170 W[5] |
| Sound pressure level | — | ≤ 50 dB(A)[5] |
| Weight (DN 63 ISO-K) | — | 12.1 kg[5] |
| Weight (DN 40 ISO-K) | — | 17 kg[6] |
| Ambient temperature | — | +5 °C to +40 °C[1] |
| Protection category | — | IP 20[1] |
| Protection class | — | I[1] |
| Electronic drive unit | — | TC 110[1] |
| Power supply pack | — | TPS 110[1] |
| Display and control unit (option) | — | DCU 002[1] |
| Manufacturer | — | Pfeiffer[4] |
| Model | — | Hicube 80 Eco[4] |
| Control unit | — | DCU 002[4] |
| Cooling | — | Air cooling; water cooling optional[1] |
| Inlet flange variants | — | DN 63 ISO-K; DN 63 CF-F; DN 40 ISO-KF[1] |
| Pumping speed for N2 | — | 67 l/s[1] |
| Backing pump pumping speed at 50 Hz | — | 0.5 m3/h[1] |
| Mains requirement | — | 110 V, 50/60 Hz; 230 V, 50/60 Hz[1] |
| Weight | — | 17 kg[1] |
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