Comparison ledger
Applied Materials 0010-13622 RF Match for, Denton Vacuum BTT IV Thermal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-13622 RF Match forApplied Materials | BTT IV ThermalDenton Vacuum |
|---|---|---|
| OEM | Applied Materials | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-13622 RF Match for | Denton Vacuum BTT IV Thermal |
| Specifications | ||
| Configuration | High Efficiency HE RF Match-Bias[1] | Benchtop[3] |
| Model | 0010-13622[1] | — |
| Product Type | RF Match for PVD (Physical Vapor Deposition)[1] | — |
| Feature | High Efficiency HE RF Match-Bias[1] | — |
| Voltage | — | 208 V, Single Phase, 50/60 Hz, 20 A[2] |
| Power | — | 208 V, Single Phase, 50/60 Hz, 20 A[2] |
| Vacuum | — | Turbo High Vacuum[2] |
| Controller | — | Touch Screen PLC Controller[2] |
| Thermal source configuration | — | Currently configured with one thermal evaporative source[2] |
| Thickness monitor | — | Crystal film thickness monitor option installed[2] |
| Bell jar | — | Quartz bell jar with implosion guard, 12" diameter x 18" high[2] |
| Ultimate vacuum | — | 5*10-6 torr[4] |
| Vacuum system | — | 70 l/sec turbomolecular pump, oil mechanical pump[4] |
| System features | — | Integrated touch screen control panel; automatic pumpdown and venting with manual overrides; automatic control of filament evaporation cycle; high vacuum valve; LN 2 cold trap clean[4] |
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