Comparison ledger
Applied Materials 0010-03254 E Chuck, Ulvac Phi Adept 1010 Automated Depth Profiling, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Ulvac |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Ulvac Phi Adept 1010 Automated Depth Profiling |
| Specifications | ||
| Manufacturer | — | Ulvac[1] |
| Model | — | Phi Adept 1010[1] |
| Instrument type | — | Quadrupole dynamic secondary ion mass spectrometer (SIMS)[2] |
| Primary beam energy range | — | 0.25–11 keV[3] |
| Mass range | — | 1–340 amu[3] |
| Net weight | — | 1,350 kg[2] |
| Shipping weight | — | ~2,400 kg[2] |
| Power supply | — | 200–230 V AC, 50/60 Hz, 50 A (single-phase)[2] |
| Operating temperature | — | 20°C ± 3°C[2] |
| Relative humidity | — | <50%[2] |