Waferpedia

Comparison ledger

0010-03254 E ChuckversusAdixen ASM 182 TD+ Helium Leak Detector

Applied Materials 0010-03254 E Chuck, Pfeiffer Adixen ASM 182 TD+ Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsPfeiffer
Category——
Wafer size——
Process node——
Introduced——
Production run—–2025
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Pfeiffer Adixen
Specifications
P/N—D 70 RTS 0 PB 710[1]
Manufacturer—Pfeiffer Vacuum[2]
Model—ASM 182 TD+[1]
Detection method—Vacuum and Sniffing Leak Detection[3]
Pumping speed for He—4.4 l/s[3]
Backing pump capacity—25 m^3/h[3]
Backing pump—Oil-Free Backing Pump[3]
Flange model (inlet)—DN 40 ISO-KF[3]
Supply—110–130 V, 50/60 Hz[3]
Language—English[3]
Mains cable—US power cable[3]
Dimensions (L x W x H)—601 x 487 x 456 mm[3]
Weight—88 kg[3]
Minimum detectable leak rate for helium (sniffing leak detection)—1 x 10^-8 Pa m3/s[3]
Minimum detectable leak rate for helium (vacuum leak detection)—5 x 10^-13 Pa m3/s[3]
Noise level—65 dB(A)[3]
Power consumption max.—1500 W[3]
Start-up time with calibration—< 5.5 min[3]
Start-up time without calibration—< 4 min[3]
User interface—Basic User Interface[3]
Test method—Vacuum and Sniffing Leak Detection[3]
Type—High Performance - Compact[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]ajvs.comajvs.com
  3. [3]ajvs.comajvs.com