Waferpedia

Comparison ledger

0010-03254 E ChuckversusVMZ R 3020 CNC Video Measuring

Applied Materials 0010-03254 E Chuck, Nikon VMZ R 3020 CNC Video Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsNikon
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Nikon VMZ R 3020
Specifications
Stroke (X x Y x Z)—300 x 200 x 200 mm[1]
Configuration—Measurement Accuracy:[1]
Auto Focus—Laser AF, Image AF (* If Type A selected, Laser AF is optional)[1]
Illumination—Diascopic, Episcopic, 8-segment LED ring illumination (3 incident angles)[1]
CCD Camera—B&W 1/3 CCD·Color 1/3 CCD (Color: type 1, 2 and A only)[1]
Type 1—0.5 - 7.5x · 9.33 x 7 - 0.622 x 0.467 mm[1]
Type 2—1 - 15x · 4.67 x 3.5 - 0.311 x 0.233 mm[1]
Type 3—2 - 30x · 2.33 x 1.75 - 0.155 x 0.117 mm[1]
Type 4—4 - 60x · 1.17 x 0.875 - 0.07 x 0.068 mm[1]
Type TZ—1 - 120x · 4.67 x 3.5 - 0.039 x 0.029 mm[1]
Type A—0.35 - 3.5x · 13.3 x 10 - 1.33 x 1 mm[1]
Guaranteed Loading Capacity (Weight)—20 kg[1]
Power Source—AC100 - 240V, 50 / 60Hz[1]
Power Consumption—5-2.5A[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing