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0010-03254 E ChuckversusIQDP 40

Applied Materials 0010-03254 E Chuck, Edwards IQDP 40, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
IQDP 40Edwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Edwards IQDP 40
Cited variants—
Specifications
Typical peak pumping speed (50 Hz)—44 m³ h⁻¹[2]
Typical peak pumping speed (60 Hz)—55 m³ h⁻¹[2]
Displacement (swept volume) at 50 Hz—52.0 m³ h⁻¹[2]
Displacement (swept volume) at 60 Hz—62.4 m³ h⁻¹[2]
Ultimate vacuum (with shaft-seals purge, 50 Hz)—5 × 10⁻² mbar[2]
Mass (pump only)—186 kg[2]
Motor power—2.2 kW[1]
Noise level—< 70 dB(A)[2]
Inlet connection—ISO40 bolted[3]
Exhaust connection—KF40[3]
Electrical supply—3-phase, 208-230/380-415 V, 50/60 Hz[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]scribd.comscribd.com
  2. [2]idealvac.comidealvac.com
  3. [3]provac.comprovac.com