Waferpedia

Comparison ledger

AIX G 4versus0020 23839 Part

Aixtron AIX G 4, Applied Materials 0020 23839 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
AIX G 4Aixtron
0020 23839 PartApplied Materials
OEMAixtronApplied Materials
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron AIXApplied Materials 0020 23839 Part
Specifications
Phase3 Phase[1]—
Voltage208V[1]—
ProcessEPI[1]—
Process GasNH3, H2, SiH4[1]—
ConfigurationGlove Box[1]Plate, Sensor Clamp, Hdpcvd Ultima +[2]
Wafer Size4 inch[1]—
Power3 Phase - 208V[1]—
Vintage2009[1]—
Glove BoxIncluded[1]—
GMSIncluded[1]—
Main PumpIncluded[1]—
Particle FilterIncluded[1]—
Cable BoxIncluded[1]—
RF GeneratorIncluded[1]—
TransformerIncluded[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing