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Comparison ledger

11980 AversusZegage 3D Optical Surface Profiler

Agilent 11980 A, Zygo Zegage 3D Optical Surface Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11980 AAgilent
OEMAgilentZygo
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 AZygo Zegage 3D Optical Surface Profiler
Specifications
Wavelength Range1250-1600 nm[1]—
Configuration—With:[2]
Interferometer—1-fold SLWD Michelson interferometer (adaptable to nosepiece)[2]
Working distance—40.0 mm[2]
Numerical aperture (NA)—0.03[2]
Control software—Mx control and analysis software[2]
Operating system—Microsoft Windows 7[2]
Computer—Dell PC with 24-inch monitor[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing