Comparison ledger
Agilent 11980 A, Wyko 400S, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 11980 AAgilent | 400SWyko |
|---|---|---|
| OEM | Agilent | Wyko |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Agilent 11980 A | Wyko 400S |
| Specifications | ||
| Wavelength Range | 1250-1600 nm[1] | — |
| accuracy | — | peak-to-valley accuracy of l/100[2] |
| repeatability | — | l/300[2] |
| test aperture | — | 100 mm (4 in.)[2] |
| zoom | — | full 6X zoom[2] |
| fringe display | — | live fringe output[2] |
| alignment system | — | simple twin spot alignment system[2] |
| measurement method | — | phase shifting capability[2] |
| available wavelengths | — | 633 nm or 1.06 µm[2] |
| optional apertures | — | 25.4 mm (1 in.) and 152.4 mm (6 in.)[2] |
Plan your fab
Building a Precision Optics process? Get a complete equipment list.
Open the fab equipment planner →